BRUKER D8 Davinci

Structure analysis on thin films and bulk materials: HRXRD
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Photographer: Adrian Moser

Application:

  • Semiconductor materials and devices (up to 100mm wafers)
  • Inorganic multilayer systems
  • Organic thin films

Structural parameters:

  • Strain & defects
  • Phase composition
  • Sin2Psi Stress & Texture
  • Qualitative phase analysis
  • Thin film thickness, density and surface & interface roughness

Techniques:

  • HRXRD: rocking curves RC and reciprocal space mapping RSM
  • Reflectivity for thin films up to 1 µm
  • Pole figures (texture, BRUKER PolyCap)
  • Sin2Psi Stress (BRUKER PolyCap)
  • GI-XRD
  • Out-of plane diffraction
  • In-plane diffraction (Bruker Ultra-GID system)
  • High temperature experiments can be conducted: T<1100°C

Lab working principle:

With the BRUKER D8 Davinci, complex crystallographic problems can be solved. Specialized experiments are set up and conducted by the staff of the Lab.

We collaborate within the frame of national and international projects and support research inside and outside Empa based on mutual agreement and interest.

Contact:   antonia.neels@empa.ch

Prof. Dr. Antonia Neels

Prof. Dr. Antonia Neels
Head of the Center for X-ray Analytics

President of the Swiss Crystallographic Society SGK

Phone: +41 58 765 4507