FEBIP Codes

Documentation:

Continuum models of focused electron beam induced processing
Milos Toth, Charlene Lobo, Vinzenz Friedli, Aleksandra Szkudlarek and Ivo Utke

Beilstein J. Nanotechnol. 2015, 6, 1518-1540

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a1) EMPA GIS simulator C++ code

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a2) EMPA GIS simulator executable files

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b) Single physisorbed gas species dimensionless FEBIP model for Gaussian Profile

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c) Single physisorbed gas species dimensionless FEBIP model for tophat Profile

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d) Two physisorbed gas species FEBIP model for exposure time dependence

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1) Single physisorbed gas species initial coverage calculator

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2) Single physisorbed gas species FEBIP model

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3) Gas mixture FEBIP model

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4) Gas mixture FEBIP model that incorporates diffusion

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5) Thermally activated chemisorption initial coverage calculator

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6) Thermally activated chemisorption

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7) Thermally activated chemisorption with diffusion

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8) EBIE with multiple reaction products

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Prof. Dr. Johann Michler

Prof. Dr. Johann Michler
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