Laszlo Pethö - Personal Page


Laszlo Pethö holds a scientist position at the Laboratory of Mechanics for Materials and Nanostructures at EMPA. He received his diploma in engineering physics with a materials science emphasis at the Budapest University of Technology and Economics in 2007, studying carbon nanotube growth methods. Following he joined the Microfabrication Laboratory at the University of California at Berkeley, as a Baseline Engineer Associate Specialist. His primary research interest was the microfabrication and characterization of CMOS and MEMS devices. In 2011, he joined the Center for MicroNanoTechnology at the Swiss Federal Institute of Technology Lausanne (EPFL), Switzerland, as a Photolithography Spe-cialist. Participating in diverse interdisciplinary projects, he worked with various semiconductor pro-cessing technologies; adding up to a microfabrication experience of over a decade with daily regularity. He joined EMPA in 2014, and his current research interests include the synthesis of novel low dimensional materials (multilayers of metals, dielectrics, and metallic nanoparticles via aggregation) by combining state of the art deposition techniques, like physical vapor deposition and atomic layer dep-osition. Using these technologies he develops thin films for the characterization of their mechanical properties, with a concentration on combinatorial deposition of pure and nanoparticle-contaminated bulk metallic glasses. His achievements include the complete design, construction overview and char-acterization of the first cleanroom at EMPA in Thun with an emphasis on photolithography and pat-terning techniques, including submicron resolution 3D printing, and multilayer structural mold fabrica-tion for electroplating applications.


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