Electron Microscopy Center

Empa's Electron Microscopy Center located in Dübendorf offers electron microscopy services to internal and external R&D partners. The center conducts forefront research in the development and application of new electron microscopy techniques in materials science and acts as a consulting unit for electron microscopy in materials science. The staff of the center carries out research tasks on-demand, offers training and provides hands-on support for practical applications.

Liquid cell (S)TEM: Electron-induced nucleation and growth of Au nanoparticles in acqueous solution of HAuCl4 (FEI Titan Themis with Protochips' Poseidon holder).

The center operates transmission electron microscopes, scanning electron microscopes and facilities for specimen preparation. Besides convention electron optical imaging (TEM & SEM), the instrumentation can be used for environmental and low-voltage SEM imaging, electron diffraction, atomic-resolution imaging by HRTEM and (aberration-corrected) STEM (Z-contrast imaging), and for analytics covering high-efficiency EDX spectroscopy (TEM & SEM), electron energy-loss spectroscopy (EELS) and energy-filtered imaging. A list of the available instrumentation can be found here.

Our expertise comprises various imaging and in particular atomic-resolution imaging techniques in the broad-beam and the scanning transmission modes, core-loss and low-loss electron energy-loss spectroscopy as well as electron tomography by dark-field scanning transmission electron microscopy and in-line electron holography by reconstructing the exit-plane wave based on a series of atomic-resolution micrographs. The experimental work is complemented by image simulations and by first-principles theoretical approaches to calculate electron energy-loss spectra of model structures. For the different simulations, software packages and workstations are available. Some of our recently started activities focus on in-situ measurements in (S)TEM using MEMS-base liquid-cell and biasing/heating specimen stages. For details about our research activities, please visit our project website and regarding our in-situ activities the website of our CLUSTER project.

Tomographic reconstruction of a nanoparticle (JEOL JEM2200fs).

Members of the electron microscopy group work on various research projects involving functional oxides, novel heterostructures for future semiconductor devices as well as in-situ and electron-holographic methods .

Our core expertises are:

  • Atomic-resolution imaging in STEM and TEM
  • Electron energy-loss spectroscopy; core- and low-loss
  • Elemental mapping by energy-filtered TEM and EDX
  • Electron tomography
  • Advanced data analysis methods and simulations
  • In-line and off-axis electron holography
Atomic-resolution STEM/EDX elemental maps of a multilayered system consisting of SrTiO3 and LaAlO3 (FEI Titan Themis).


  • Here: new website for the ERC CLUSTER project with more information about our in-situ activities.

  • FEI Titan Themis: Empa's Electron Microscopy Center goes sub-Ångström. The new FEI Titan Themis has been put into operation end of 2016. The new microscope will be used for high-resolution imaging, analytics and in-situ measurements. First liquid cell measurements of nucleation reactions have been carried out successfully.

  • Past news

Aberration-Corrected Imaging in Transmission Electron Microscopy – An Introduction

2nd edition (2015): available here