XPS Physical Electronics Inc. Quantum 2000

Phi Quantum 2000
The Phi Quantum 2000 is an imaging XPS spectrometer with a later resolution of about 15 µm. A monochromatized scanning Al Kα source provides imaging capabilities as well as high spectral resolution (FWHM Au 4f7/2: 0.72 eV). Samples prepared in one of the deposition systems can be transferred in situ, i.e. without breaking the vacuum during transfer.